Abstract
Pulsed laser deposition is widely used to grow BaTiO3 thin films. We investigated the influence of oxygen pressure during growth on the topography, microstructure, and roughness of ferroelectric epitaxial BaTiO3 thin films. It also presented an analysis of the epitaxial growth mode and defects throughout the film thickness using aberration-corrected transmission electron microscopy. Although ferroelastic (twin boundary) domain walls are absent, several misfit dislocations were observed and might be the primary cause of the observed island growth mode.
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