Abstract
This paper deals with different mechanisms of the interaction of light and heavy low-energy ions with nanoporous structures and main structural changes that occur in these structures under irradiation. The study was carried out using the molecular dynamics method for silicon models with pores of radius of 8 and 28 Å, which are structural analogs of porous films with low dielectric constant (low-k materials). Based on the results obtained, the mechanisms of interaction of light and heavy noble gas ions (He, Ne, Ar, and Xe) with these structures were compared, and the effects of ion mass and energy on processes of pore sealing were studied.
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