Iron doped thin TiO2 films synthesized with the RF PECVD method

Abstract

Iron doped titanium dioxide coatings were synthesized with the help of RF plasma enhanced CVD technique. As a source of titanium, titanium chloride (IV) TiCl4 was used while iron pentacarbonyl (0) Fe(CO)5 served as iron supply. The coatings were diagnosed using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). Their elemental and chemical composition was studied with the help of X-ray energy dispersive spectroscopy (EDS) and Fourier transform infrared (FTIR) spectroscopy, respectively. For the determination of their optical properties, variable angle spectroscopic ellipsometry (VASE) and ultraviolet-visible (UV-Vis) spectroscopy techniques were used. Iron content in the range of 0.07–11.5 at% was found in the films. Apart from oxygen, titanium and iron, a presence of trace amounts of chlorine, very likely originating from the titanium precursor, was recorded. FTIR studies showed that iron was built-in in the structure of TiO2 matrix. Surface roughness, assessed using SEM and AFM techniques, increases with an increasing content of this element. VASE measurements revealed an increase of the coatings refractive index with a growing iron concentration, with the extinction coefficient remaining low and independent of that parameter. Trace amounts of iron resulted in a lowering of an absorption threshold of the films as well as their optical gap, but the tendency was reversed for high concentrations of that element.