Abstract
The cubic structure 8YSZ (8%Yttria-Stabilized Zirconia) thin films deposited by PLD(Pulsed Laser Deposition) on substrates Si (100) and Pt/Si (111) by identical control parameters have potential applications as electrolytes for planar micro electrochemical devices like Lambda oxygen sensors and IT-�SOFC. It appearance differences in polycrystalline structural and optical characterization by XRD (X-ray Diffraction), SEM (Scanning Electron Microscope), AFM (Atomic Force Microscopy) and V- VASE (Variable Angle Spectroscopic Ellipsometry. The differences are relating on crystalline dimensions, lattice parameters; surface roughness measured by V- VASE and AFM are presented synthetic to evidence the differences generated by substrates.
Highlights
The 8 YSZ (8% Y2O3 doped ZrO2) thin films are high-k dielectrics advanced materials used as electrolytes in many fields like electrochemical devices - gas sensors for automotive application and intermediated temperatures (IT) solid oxide fuel cell (SOFC). 8YSZ electrolytes have high oxygen ionic conductivity and high ionic resistivity [1, 2]
The cubic phase of 8 YSZ is stabilized on a large field of temperatures including low temperature (t
The thickness and the structures of the film can be controlled by deposition parameters.The task of this paper is to investigate the effects of Si (100) and Pt/Si (111) substrates on the optical and structural properties [10, 11]
Summary
The 8 YSZ (8% Y2O3 doped ZrO2) thin films are high-k dielectrics advanced materials used as electrolytes in many fields like electrochemical devices - gas sensors for automotive application and intermediated temperatures (IT) solid oxide fuel cell (SOFC). 8YSZ electrolytes have high oxygen ionic conductivity and high ionic resistivity [1, 2]. This material assures a good compatibility with electrodes, is gas tight and chemically stable at high temperatures (t < 1200oC) [3]. The thickness and the structures of the film can be controlled by deposition parameters (laser fluency, laser wavelength, deposition time, substrate material, substrate temperature, distance target- substrate etc.).The task of this paper is to investigate the effects of Si (100) and Pt/Si (111) substrates on the optical and structural properties [10, 11]. Such properties are studied by XRD, SEM, AFM and V-VASE
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