Abstract
The rate coefficients for the electron impact ionization of the CO molecule have been calculated in the presence of the radio-frequency (RF) electric field. The non-equilibrium electron energy distribution functions, used for the rate coefficient calculations, were generated by using a Monte Carlo simulation. The rate coefficients were obtained, time resolved within one period, in the frequency range from 13.56 up to 500 MHz, at effective reduced electric field values up to 700 Td. A temporal behavior of the rate coefficients under the influence of magnitude and frequency of the fields has been studied. The total ionization rate coefficients and the rate coefficients for the production of different ion fragments have been period averaged and presented in the order to be of use for practical implementation in the RF discharges in CO. Also, the temporal characteristics of the electron energy distribution functions and the diffusion coefficients have been studied separately revealing some interesting features in their time dependence within the period of electric field oscillations.
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