Abstract
Near-surface compositional changes in alloys during ion bombardment have been studied theoretically. The scheme employed ensures pressure relaxation of the target, and the effects of preferential sputtering, collisional mixing, radiation-enhanced diffusion, and Gibbsian and radiation-induced segregation are allowed for. High-fluence composition profiles were determined directly from a nonlinear integro-differential equation by means of an efficient iteration procedure developed recently. The dependence of the composition profile on input parameters such as target temperature and defect mobility was examined for NiCu and NiPd alloys.
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