Abstract
Changes in the surface composition and in the sputtering rate of binary alloys were calculated using a kinetic model that includes the effects of radiation-induced segregation and preferential sputtering. Numerical solutions were obtained for two dilute Ni-based model alloys, Ni-Cu and Ni-No, under 5-keV Ar + ion bombardment as functions of sputtering time, temperature, and intial alloy composition. In the temperature range 200 – 850°C, the sputtering rate is initially affected by strong radiation-induced segregation. As the bombardment time increases, preferential sputtering becomes dominant; the surface composition and hence, the sputtering rate, approach the steady-state values determined entirely by the sputtering coefficients of the alloy components. Below 200 and above 850°C, the sputtering rate is controlled by preferential sputtering only because radiation-induced segregation is insignificant in these temperature regimes.
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