Abstract

Kinetic energy distributions of various ionic species from a TiO 2 film have been obtained using the energy cut-off property of an ion reflector in a laser microprobe mass spectrometer. The energy distributions of elemental ions are more positive and broader than those of polyatomic ions. They all have a substantial contribution in the “negative” energy range. At higher laser energy densities, the ion kinetic energy distributions become broader and shift towards “lower” energy values. Chemically different ion species have different energy distributions. The energy distributions are attributed predominantly to the locus of ion formation in the accelerating electrostatic field.

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