Abstract
Morphological development on InSb(001) surfaces, under ion irradiation, has been investigated by means of Atomic Force Microscopy in UHV conditions. The InSb(001) surface has been exposed to Ar+ beam with varying incident angles (from 0° to 80° off-normal) for energy 4.0 keV and fluence 4x1017 ion/cm2. Different kinds of nanostructures, depending on ion incident angle, have been observed on the irradiated surfaces such as nanocavities, or nanorings and nanodots, preferentially for close to normal incidence, and well-order ripples for the oblique incidence. The formation of ripple structures on InSb(001) surfaces as a function of the incidence angle has been observed. The orientation of the ripples has been found to be incident angle dependent and it is perpendicular, or parallel to the ion beam projection on the irradiated surface for angles of 45° and 80°, respectively.. The results have been discussed in terms of ballistic processes of sputtering and Bradley Harper theory for surface modifications.
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