Ion implantation technology in the national laboratories: Four decades of technology transfer

Abstract

The Department of Energy national laboratories and their predecessor organizations have played a prominent role in the development of ion implantation technology for the past four decades. Beginning with the birth of ion beam technology in the large-scale electromagnetic separation of isotopes in the 1940s, the national laboratories have made major advances in ion source technology and in the use of ion beams for materials processing. Many of these advances have found their way into the private sector in the form of new equipment and processes. The history of this technology transfer is reviewed along with examples of recent successes in ion implantation technology at the national laboratories. The positive impact of new legislation promoting technology transfer and the increased emphasis on making unique facilities at the national laboratories available to outside users is also discussed.