Abstract
A finite energy width of the ion beam after being extracted from a metal ion source has been measured by using a mass spectrum analyzer of magnetic prism type. The method of analysis is described in which effects of velocity dispersions in longitudinal and lateral directions, slit width, scan effect, and prism angle are taken into account. The energy width of Cu ions has been determined by considering the width of the spectrum at a maximum slope under magnetic field scanning. The energy width is found to be of the order of the pre-sheath depth, the ion temperature effect having a secondary effect. The method has the merit of causing no disturbance on the plasma and will be useful for the beam diagnostics and for designing an ion source for a three dimensional ion implantation.
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