Ion energy spectrum control in modified cross-beam pulsed laser deposition method

Abstract

The time-of-flight curves of the ion current to a probe in a plasma beam formed by crossing plumes from two laser-ablated silicon targets have been measured using the Langmuir probe technique. It is established for the first time that the ion energy spectrum of the plasma beam formed by the two laser erosion plumes and oriented in the direction of the bisector of the angle between the initial plumes can be modified by changing the angle between them (i.e., between the erosion plume). A modified cross-beam pulsed laser deposition method is proposed, which allows the energies of deposited particles to be controlled in a broad range.