Abstract
The modified crossed-beam pulsed laser deposition method, which allows wide-range variations in the energy of deposited particles, is presented for the first time. Time-of-flight curves (TFCs) of silicon ions that are formed by the crossed plumes from two silicon targets and the erosion plume from one silicon target are measured using the Langmuir probe technique. It is demonstrated that the TFCs of ions from the erosion plume are approximated by sums of the one-dimensional Maxwell velocity distributions. Variations in the ion concentrations that result from the interaction are measured. Transformations of the energy spectrum of the plasma beam formed by crossed plumes are determined using variations in the angle between the plumes.
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