Abstract
AbstractProbes interacting with a low temperature plasma are typically built of electron conducting materials, mostly metals. We apply yttria‐stabilized zirconia (YSZ) which is oxygen ion conducting at elevated temperatures and which is a typical solid electrolyte with high ionic and negligible electronic conductivity. The processes at the plasma|YSZ interface are discussed and first results of measurements with ion‐conducting single‐ and double‐probes in oxygen containing radio frequency plasmas are presented. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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