Abstract
Bilayered films composed of diamond-like carbon (DLC) and titanium nitride (TiN) or individual DLC films were prepared on the surface of polymethylmethacrylate (PMMA) substrates using ion beam-assisted deposition. The deposition of the DLC or the TiN films were carried out by Ar + sputtering graphite or titanium targets and CH n+ or N + ion beams simultaneously bombarding the resulting films at various energies. Results of scanning electron microscopy, X-ray photoelectron and Raman spectroscopy analysis indicated that the DLC films on the PMMA and the TiN/PMMA substrates were amorphous and smooth with the structure of mixed sp 2+sp 3 bonding. The DLC films on the TiN/PMMA system exhibited an obvious improvement in hardness and wear resistance as comparing to the PMMA only substrate.
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