Abstract
Rutherford backscattering spectra have been collected from crystalline targets which have been rotated continously about an axis perpendicular to the surface. Repeated measurements on the same arsenic implanted (100) silicon sample made over a period of six months show good reproducibility with a standard deviation (1 σ) of ±1.3% on data points with a statistical uncertainty in the range ±0.9% to ±1.2%. It is concluded that the technique is suitable or accurate determination of relative doses of implanted impurities.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Nuclear Instruments and Methods In Physics Research
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
