Abstract
A novel technology has been developed in order to produce 50–100 nm thick films on small steel spheres by using ion beam assisted deposition. The films were produced by simultaneous steps of deposition and implantation. Several parameters were investigated (ion current, deposition rate, balls rotation rate…) and different analyses were performed in order to determine the optimal process parameters. Optical and electronic microscopy and energy dispersion X-rays spectroscopy were carried out to study the resulting morphology, homogeneity and thickness of the deposited films. By using mechanical methods, the adhesion properties were tested. Finally, well working coatings with smooth morphology and good adhesions were produced in a controlled process and then field-tested.
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