Abstract

The theory of the nonmodal ion-acoustic instability in the skin layer of the inductively coupled plasma is developed. This instability has a time-dependent growth rate and is driven by the current formed in the skin layer by the accelerated motion of electrons relative to ions under the action of the ponderomotive force. We found that the development of the ion-acoustic turbulence (IAT) in the skin layer and the scattering of electrons by IAT are primary channels of the nonlinear absorption of the RF energy in the skin layer.

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