(Invited) SAE-MEMS Technology for Electrostatic Vibrational Energy Harvesters

Abstract

Energy harvesting [1] is expected to be a self-powering technology for small wireless sensor nodes in the next generation Internet-of-Things (IoT). In particular, small vibrational energy harvesters (VEHs) based on micro-electro-mechanical systems (MEMS) technology, which are battery-free and can generate electricity even at night or in the dark, are being investigated worldwide for next-generation power sources for small wireless IoT nodes [2,3]. Electrostatic MEMS VEHs, which use semi-permanent charge-holding dielectrics called "electrets," are useful for power generation using environmental vibrations because they have a higher output power density at lower frequencies than other methods [4]. Further miniaturization, higher performance, and higher productivity will be required to use electret-type MEMS VEHs as power sources for compact wireless IoT nodes and other devices. Although the integration of MEMS VEHs with power management circuits enables miniaturization, higher performance, and improved productivity, the monolithic integration of electret-type MEMS VEHs and electronic circuits is an unexplored area in conventional technology. Conventional electrostatic MEMS VEHs involve corona discharge, electron beam irradiation, X-ray irradiation, or high-temperature treatment as electret charge processing, which imposes restrictions on the design and manufacturing of MEMS structures and the integration of MEMS and electronic circuits. Recently, self-assembled electrets (SAEs), which are electrets that do not require any charging process, have been developed using materials for organic electroluminescent devices [5]. The surface charge density of SAEs is equivalent to those of previously reported electrets for VEHs, and thus SAE is expected to improve the performance of VEH and simplify the manufacturing process. However, there have been no reports of MEMS devices using SAEs.Our proposed method is the first technology to form SAEs inside MEMS structures using only a vacuum evaporation process at room temperature, and we have succeeded in actual vibration power generation [6]. This technology can be integrated into existing semiconductor processes because the electret formation requires only room-temperature deposition, making it possible to monolithically integrate electret-type MEMS VEHs and electronic circuits on the same substrate. In addition, since the SAE surface potential is proportional to the film thickness, the amount of electricity generated can be further increased by increasing the thickness of the SAE film. Therefore, this technology is expected to accelerate the miniaturization, performance, and productivity improvement of MEMS environmental vibration power generation devices. Akinaga, “Recent advances and future prospects in energy harvesting technologies,” Jpn. J. Appl. Phys. 59 (2020) 110201.D. Mitcheson, E. M. Yeatman, G. K. Rao, A. S. Holmes, and T. C. Green, “Energy Harvesting from Human and Machine Motion for Wireless Electronic Devices” Proc. IEEE 96 (2008) 1457–1486.Suzuki, “Recent progress in MEMS electret generator for energy harvesting,” IEEJ Trans. Elec. Electron. Eng. 6 (2011) 101-111.Toshiyoshi, S. Ju, H. Honma, C.-H. Ji, and H. Fujita, “MEMS vibrational energy harvesters,” Sci. Technol. Adv. Mater. 20 (2019) 124-143.Tanaka, N. Matsuura, and H. Ishii, “Self-Assembled Electret for Vibration-Based Power Generator,” Sci. Rep. 10 (2020) 6648.Yamane, H. Kayaguchi, K. Kawashima, H. Ishii, and Y. Tanaka, “MEMS post-processed self-assembled electret for vibratory energy harvesters,” Appl. Phys. Lett. 119 (2021) 254102.