Abstract

ZnO nanostructures were fabricated on transparent conductive Al-doped ZnO films by a novel multi-annealing process in which the reducing annealing and oxidization annealing were carried out in turn to achieve the re-crystallization of ZnO film on AZO film. As the result, ZnO nanostructures with good alignment were fabricated vertically on the AZO film with the high transmittance over 80%. The photoluminescence properties of ZnO nanostructures were influenced significantly by the annealing processes. An intense blue-green emission centered at 491nm in the visible range was observed from obtained ZnO nanostructures. The growth mechanism of the ZnO nanostructures was investigated in detail.

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