(Invited) In-Depth DC and Low Frequency Noise Characterization of Nanosheet FETs at Room and Cryogenic Temperatures

Abstract

In this work, an in-depth static and low frequency noise characterization of nanosheet FETs, consisting of two vertically stacked silicon channels per device, is performed. A comparison of the performances from n- versus p-channel FETs operated at 300 K and 78 K, in terms of static and low frequency noise parameters variability, is also discussed. The main electrical parameters are estimated from the I-V characteristics using access resistance robust methodologies. An additional criterion demonstrating that the extracted parameters are not influenced by the second mobility attenuation factor is proposed. The low frequency noise studies prove that the dominant flicker noise mechanism is linked to correlated carrier number and mobility fluctuations, with additional access resistances noise contribution in very strong inversion. The importance of the considered total flicker noise model on the estimation of the Coulomb scattering coefficient is highlighted.