(Invited) Fabrication of Highly Ordered Anodic Porous Alumina and Its Applications to Functional Nanodevices

Abstract

The anodic porous alumina, which is formed by anodization of Al in an acidic electrolyte, has attracted much interest as the starting materials for various types of functional nanodevices due to its unique geometrical structures.1) It has been reported that long-range-ordered anodic porous alumina with an ideally ordered hole arrangement can be obtained under appropriate anodization conditions.2-4) Such ordered structures are useful for the preparation of the functional nanodevices, which require the ordered nano- structures. The control of hole intervals and hole sizes of anodic porous alumina while retaining the long-range ordered hole arrangement is very important for expanding the application fields of the anodic porous alumina. As an example of the expansion of the range of the hole intervals and hole sizes with long-range ordered hole arrangement, we have shown the formation of long-range-ordered anodic porous alumina with reduced hole intervals and hole sizes. In this process, highly ordered anodic porous alumina with reduced hole interval of ~25 nm can be obtained by the appropriate anodizing condition5,6). In the present report, the formation of the highly ordered anodic porous alumina with various hole intervals and hole sizes will be presented. In addition, the template synthesis of the ordered nanostructures with reduced dimensions will be also reported. 1. T. Yanagishita, T. Hidaka, M. Suzuki, and H. Masuda, J. Vac. Sci. Technol. B, 34, 021804 (2016). 2. H. Masuda and K. Fukuda, Science, 268, 1466 (1995). 3. H. Masuda, F. Hasegawa, and S. Ono, J. Electrochem. Soc., 144,L127 (1997). 4. H. Masuda, K. Yada, and A. Osaka, Jpn. J. Appl. Phys., 37, L1340 (1998). 5. H. Masuda, M. Nagae, T. Morikawa, and K. Nishio, Jpn. J. Appl. Phys., 45, L406 (2006). 6. H. Masuda, K. Takenaka, T. Ishi, and K. Nishio, Jpn. J. Appl. Phys., 43, L1165 (2006).