Abstract
Anodized nano-crystalline silicon (nc-Si) layer is one of the self-organized Si nanostructures formed by electrochemical process. In addition to efficient luminescence, many specific effects are induced in nc-Si. For instance, the enhanced electron transport and the decreased thermal conduction lead to emission of ballistic electrons and acoustic wave, respectively. It is shown here that the ballistic electron emitter is useful for mask-less parallel lithography under an active-matrix drive mode. Also, injection of emitted energetic electrons into metal-salt solutions promotes reduction of positive ions and subsequent thin film deposition. On the other hand, the extremely lowered thermal conductivity and heat capacity of nc-Si layer enable efficient thermos-acoustic conversion at the surface. Being a broad-band flat ultrasound emission with no resonant peaks, the device can reproduce well the complicated acoustic communication calls between mice.
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