Abstract
This paper introduces a high-sensitivity accelerometer module to measure micro muscular sounds. The feature of our microelectromechanical systems (MEMS) accelerometer is the use of high-density gold proof mass structure fabricated by the multi-layer metal technology for reducing the Brownian noise. The noise floor of the proposed module is 10-dB better than that of a commercial one. The measurement results showed that our module can capture small muscular sounds which are buried in the noise of the commercial accelerometer.
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