Abstract
This paper reviews the feature of our proposed MEMS (microelectromechanical systems) accelerometer and the issue of its reliability. In order to realize micro-G (1 G = 9.8 m/s2) level sensing, we have proposed capacitive MEMS accelerometers with gold proof mass using the multi-layer metal technology. Utilizing gold as a high density material of the proof mass reduces the Brownian noise (BN ), which is a crucial factor to determine the resolution of MEMS accelerometer. As a result, we can obtain the low value of 22 nG/√Hz despite the same size of gold proof mass as silicon proof mass. Regarding the reliability, the heat cycle and the vibration cycle tests are conducted. The experimental results suggest that the MEMS accelerometer has potential for a practical use. In conclusion, we confirm that our proposed MEMS accelerometer can make a contribution to a new technical development.
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