Abstract

Zinc oxide was deposited on flexible substrate over a large area to demonstrate nano charge generation capability using spray pyrolysis technique for the first time. The influence of growth substrate temperature towards piezoelectric property has been investigated. It is observed that the samples deposited at 300°C showed best output peak voltage of 1.91V. A direct relation between piezoelectric output and intrinsic defects from photoluminescence spectra is observed. A load v/s voltage output along with capacitance-voltage analysis is performed to investigate the effect of loading on the polarization of ZnO. The enhanced piezoelectric response of ZnO compared to previous reports is due to very low intrinsic defects, smooth morphology and pre-strained behavior of substrate. The curved profile nano generator harvests electricity by d31 mode. ANSYS stress-strain simulation of arched shape film is performed, in which large stress due to large strain even at very low load is observed.

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