Investigation the effect of porosity on corrosion of macroporous silicon in 1.0 M sodium hydroxide solution using weight loss measurements, electrochemical methods and scanning electron microscope

Abstract

In this study, the macroporous silicon has been fabricated by electrochemical anodization. The dissolution of n-type silicon wafers in etching solution conforms Faraday’s laws of electrolysis. The fabricated macroporous silicon with different porosity corrosion in 1.0M NaOH was systemically investigated by weight loss measurements, electrochemical methods and scanning electron microscope. Results show that with the porosity increasing, the corrosion rate of macroporous silicon in 1.0M NaOH increases linearly. In addition, the increase of corrosion rate of macroporous silicon with relative higher porosity was determined by the pre-exponential factor.