Abstract
The fabricated macroporous silicon with a porosity of 26.33% corrosion in NaOH solution was systemically investigated by open circuit potential measurements, linear polarization measurements, potentiodynamic polarization measurements, and scanning electron microscopy, respectively. Results show that the potential open circuit and linear polarization resistance decreases with the NaOH concentration increasing. The corrosion potential shifts significantly to more negative potentials and corrosion current density increases with NaOH concentration increasing. Adding ethanol to 1.0 M NaOH can lead to the linear polarization resistance decrease, corrosion potentials shift in the positive direction, and corrosion current density increase. In addition, the scanning electron microscopy images demonstrate that the macroporous silicon samples are seriously damaged by 1.0 M NaOH and 1.0 M NaOH/EtOH (30%).
Highlights
Porous silicon (PS), formed on the surface of crystalline silicon substrates by electrochemical anodization in hydrofluoric acid, was firstly observed by Uhlir in 1956 at the Bell Labs during the investigation of electrochemical methods for polishing germanium and silicon wafers [1]
According to our previous works [18,19,20], the corrosion of PS in NaOH, KOH, and (CH3)4NOH was studied by weight loss measurements, there are few works focusing on the investigation of PS corrosion in alkaline solutions using open circuit potential measurements, linear polarization measurements, and potentiodynamic polarization measurements
In 0.1 M NaOH, the curve shows a marked increase of potential towards positive direction, which indicates that the macroporous silicon electrode surface is oxidized by low concentration of NaOH solution
Summary
Porous silicon (PS), formed on the surface of crystalline silicon substrates by electrochemical anodization in hydrofluoric acid, was firstly observed by Uhlir in 1956 at the Bell Labs during the investigation of electrochemical methods for polishing germanium and silicon wafers [1]. According to our previous works [18,19,20], the corrosion of PS in NaOH, KOH, and (CH3)4NOH was studied by weight loss measurements, there are few works focusing on the investigation of PS corrosion in alkaline solutions using open circuit potential measurements, linear polarization measurements, and potentiodynamic polarization measurements. Considering the importance of electrochemical parameters of PS corrosion in alkaline solutions, the aim of the present work is to report the corrosion behavior of macroporous silicon in NaOH solution by electrochemical methods. The corrosion behavior of macroporous silicon in NaOH solution without and with ethanol (EtOH) was systemically studied using open circuit potential measurements, linear polarization measurements, potentiodynamic polarization measurements, and scanning electron microscopy
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