Investigation on Wire Electrochemical Micro Machining of Ni-based Metallic Glass

Abstract

Metallic glasses (MGs) have been recognized as promising materials for realizing high-performance micro devices in micro electromechanical systems (MEMS) due to their excellent functional and structural characteristics. However, the applications of MGs are currently limited because of the difficulty of shaping them on the microscale. Wire electrochemical micro machining (WECMM) is increasingly recognized as a flexible and effective method to fabricate complex-shaped micro metal components with many advantages relative to the thermomechanical processing, which appears to be well suitable for micro shaping of MGs. We consider the example of a Ni-based MG, Ni72Cr19Si7B2, which has a typical passivation characteristic in 0.1M H2SO4 solution. The transpassive process can be used for localized material removal when combined with nanosecond pulsed WECMM technique. In present work, the applicable electrolyte for WECMM of the Ni-based MG was discussed firstly. Then the voltage pulse waveform and electrolyte composition were modified to improve machining efficiency and stability. Several complex microstructures such as micro curved cantilever beam, micro gear, and micro square helix were machined with different optimized parameters.