Abstract

Abstract Wire electrochemical micromachining (WECMM) is a non-traditional technique that is suitable for micro-structures processing of metallic glass (MG). The composition of metallic glass is complex, and the electrochemical characteristics of metallic elements are different, which greatly increases the difficulty of high-quality electrochemical micromachining of MG. In this study, the electrochemical dissolution characteristics of the amorphous material, Ni82Cr7Si5Fe3B3, are analyzed in detail. The AC impedance spectrum and dissolution states of MG in 0.1 M NaCl, NaNO3, HCl, and H2SO4 solutions are explored, and the dissolution characteristics of metal elements in Ni82Cr7Si5Fe3B3 are also investigated to determine the electrolytic properties of MG. By comparing the results of WECMM experiments in different solutions, the appropriate solution was chosen as electrolyte, and the effects of different parameters on WECMM of Ni82Cr7Si5Fe3B3 were studied. Finally, the optimal processing parameters achieved by the experiments, 0.25 M dilute H2SO4 solution, ultrashort pulse voltage amplitude 7 V, pulse period 3 μs, a pulse duration of 90 ns and a feed rate of 0.2 μm/s were applied to complete the machining of the MG micro-slits. And several complex micro-structures with good surface morphology were thus obtained. For example, a gear with an index circle diameter of 1 mm, a curved cantilever beam with a width of 30.5 μm and a micro round wheel with the thickness of 100 μm.

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