Abstract

The work described in the present paper is about electromigration induced void formation mechanisms in Cu lines. An unusual behavior observed on the electrical resistance of some samples suggests the presence of more than one void in the stressed lines. The scope of this paper is about the origin of these voids; mainly how they appear in the lines and how they affect the Cu lines reliability.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.