Abstract
This study meticulously examines how oxygen incorporation alters the microstructure, mechanical, and high-temperature properties of AlN coating prepared via cathodic arc deposition. Substitution of nitrogen by oxygen in the AlN lattice leads to the formation of Al(OxN1-x)y metastable solid solutions from wurtzite Al(O)N structure to cubic AlO(N) structure, culminating in a full conversion to γ-Al2O3 with increased oxygen content. This substitutive solid solution induces solid solution strengthening and grain refinement effect, thereby escalating hardness from ∼18.5 GPa for AlN to ∼23.9 GPa for Al(O0.18N0.82)1.09. Despite an observed tendency towards enhanced thermal decomposition of oxynitride coatings upon annealing, the occurrence of α-Al2O3 oxide phase significantly preserves the mechanical integrity at elevated temperatures, outperforming pure AlN coating. Notably, the strategic alteration by minimal oxygen incorporation facilitates the formation of an Al-rich oxide layer, which exhibits superior anti-oxidative characteristics. After oxidation at 1100 °C for 10 h, the Al(O0.10N0.90)1.03 with an oxide layer of ∼1.2 μm exhibits remarkable oxidation resistance.
Published Version
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