Abstract
Novel fixed abrasive lapping (NFAL) is used in this study to quickly remove the surface damage layer and control the depth of subsurface damage (SSD), thus saving overall machining time and reducing the costs of large-aperture optical manufacturing. The influence of lapping parameters on the surface and subsurface state is studied through a series of experiments to better understand the material removal and damage mechanisms during NFAL. A surface evolution model for NFAL was established based on indentation fracture mechanics, mathematical statistics, abrasive wear theory and convolution iteration principle. Experimental results show that the model can predict the surface topography well. Further simulation experiments were also conducted to study the effects of the tool load and particle size on the microscopic removal characteristics of the NFAL process. The results show that NFAL can quickly produce submicron-level surface roughness and restrain SSD with the reasonable selection of lapping parameters.
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