Investigation on surface compositions of CuNi alloy under Ar + ion bombardment by ISS and in situ AES measurements

Abstract

Surface compositions of CuNi(50 wt%) alloy under 3 keV Ar + ion bombardment were measured by Auger electron spectroscopy (AES) and ion scattering spectroscopy (ISS). In situ AES measurement of sputter-deposited layer and sputtered sample surface indicated that surface composition became Ni-rich due to Ar + ion sputtering at steady state, in accord with previous reports of preferential sputtering. ISS measurements with 3 keV Ar + ions, however, have suggested that the composition of the outermost atom layer is not Ni-rich but slightly copperrich. This leads to the conclusion that the degree of preferential sputtering is small and that the question of preferential sputtering, particularly, the ratio of the sputtering yields, S Cu S Ni , based on AES measurement requires further examination.