Abstract
AbstractThin AlN films prepared by post‐irradiation with N2+ ions were examined using Auger electron spectroscopy (AES) and ion scattering spectroscopy (ISS) measurements. The AES spectra clearly indicate the existence of nitrogen in an aluminium substrate that had been irradiated by N2+ ions, forming AlN layers in the subsurface region, whereas ISS revealed only a tiny peak of nitrogen atoms on the topmost surface. The in‐depth composition of the AlN in the surface region was speculated by using a series of chemical compositions assessed from AES and ISS measurements, leading to the proposal of an altered layer formation that is quite similar to those observed in alloy surfaces under ion bombardment. Copyright © 2002 John Wiley & Sons, Ltd.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
