Abstract
S-136 (STAVAX ESR) steel has been widely applied in the mold manufacturing industry. Commercially available S-136 steel possesses high surface roughness, which exerts negative effects on the device performance. In this paper, S-136 steel surface planarization using chemical mechanical polishing (CMP) was investigated and the process parameters included down pressure, platen speed, slurry pH and abrasive category. The results demonstrated that the relationship of material removal rate (MRR) with respect to the multiply of pressure and platen speed was in accordance with a modified Preston equation: MRR=(KP+B0) V+R0. With the variation of pH, the MRR changed rapidly. Compared with initial root mean square (RMS) roughness of 37.47nm, the ultra-smooth surface with RMS roughness 3.01nm was obtained under optimized condition with MRR as high as 187nm/min. Finally, optimized CMP process parameters for S-136 steel were proposed and its CMP mechanism was discussed in detail.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
