Abstract
The morphologies of dislocation etch pits and dislocation deflections of on-axis 4H-SiC substrate etched by molten KOH were observed with the help of a microscope. Based on experimental observation and etch mechanism, a method for the identification of threading edge dislocations, threading screw dislocations (TSDs) and threading mixed dislocations was proposed. The details about the inner micro-structure of threading edge dislocations and TSDs were observed by laser scanning confocal microscope and scanning electron microscopy. The morphologies and the cross-sectional views of the basal plane dislocation formed by threading edge dislocation were observed and two models were formed to explain it.
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