Abstract
Polycrystalline BaTiO3/SrTiO3 (BT/ST) multilayer thin films were fabricated via pulsed-laser deposition onto Pt/Ti/SiO2/Si substrates. The dielectric constant of the multilayer films was obviously enhanced and the dielectric loss was almost the same as that of the pure BaTiO3 and SrTiO3 thin films. A dielectric constant of 721 at 10 kHz was observed for a stacking periodicity of 60 nm at room temperature and the corresponding dielectric loss was maintained below 0.04. The study indicates that there are some differences between the multilayer films and the pure films in electrical properties. The mechanism of dielectric enhancement of the multilayer thin films was discussed.
Published Version
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