Investigation of ZrN thin film prepared by dynamic mixing

Abstract

ZrN films on steel substrates were fabricated by dynamic ion beam mixing (ion-beam-assisted deposition). Zirconium was deposited onto the substrate when the zirconium target was sputtered by a low energy argon ion beam. Meanwhile, the film was bombarded by a high energy nitrogen ion beam. The hardness, adhesion and crystal structure of the resulting film and the distribution, chemical state of the elements in the film were examined by X-ray diffraction. Auger electron spectroscopy and X-ray photoelectron spectroscopy. The experimental results showed that the film mainly consists of ZrN crystal as well as a small amount of ZrC, ZrC, ZrO 2, and carbon in the free state. The existence of a transitional area between the film and the substrate results in better adhesion of the film than is found for conventional coatings.