Abstract
Cenospheres are lightweight, inert hollow spheres which are useful in a large number of applications, particularly as fillers. This paper describes the mechanical resonant characteristics of miniature hollow hemispheres fabricated from sodium borosilicate cenospheres for potential use as sensing elements in inertial sensors, biochemical detectors and other devices. The tested structures are approximately 200 µm, 150 µm and 1.8 µm in diameter, height and thickness, respectively, with the dome anchored and the rim free. The lowest order wine glass modes of these structures are experimentally determined (and confirmed by modeling) to be in the range of 300–600 kHz-–in the range of those of planar micro-resonators that have been explored for sensing applications.
Published Version
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