Abstract
Vanadium oxide films were deposited on ITO (Indium Tin oxide) glass substrates at room temperature by reactive DC magnetron sputtering. The effect of annealing temperature on composition, microstructure, optical properties, and electrochromic properties of vanadium oxide films were investigated by X-ray diffraction, field-emission scanning electron microscope (FE-SEM), UV-visible spectrometer, and cyclic voltammetry. These films showed (110) crystalline orientation after annealing at 300 °C. V2O5 films with more porosity had better electrochromic property and optimal performance after heat treatments.
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