Investigation of two-dimensional radio-frequency sheath properties using a microscale fluid model

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Abstract In previous work (Kohno H. and Myra J.R. 2023 Comput. Phys. Commun. 291 108841), we developed a numerical scheme based on a two-dimensional microscale radio-frequency (RF) sheath model with periodically curved wall boundaries. Here, we expand the capability of this scheme through modification of the boundary conditions (BCs) on the conducting walls, which allows the ion flow to turn back to the plasma at locations on the walls where the electromagnetic force on the ions is reversed from its usual direction. Numerical simulations are carried out to investigate the dependences of the surface-integrated admittances on the wall bump height, ion magnetization, ion mobility, and the magnetic field angle, and to visualize the sheath structures in several cases. One of the main results is the ion cyclotron admittance resonance observed under the condition of low ion mobility (high normalized frequency). It is shown that the amplitude of the resonance peak depends on the wall bump height and the ion velocity is reversed on the sides of the bump in an RF cycle for the resonance cases. Furthermore, the differences in the admittances between the one- and two-dimensional microscale models are assessed for the purpose of understanding non-locality of the sheath near the wall surface for the parameters considered in this study. This information will be essential for improving the sheath BC for macroscale calculations in the future.