Investigation of thermal stability, optical properties, phase and chemical composition of transparent conductive tin oxide films deposited by pyrolytic method on silica float glass

Abstract

The object of research is transparent conductive coating based on fluorine doped tin oxide deposited on silica float glass by the pyrolytic method. However, both in the manufacturing process of such a coating and in the process of its operation, degradation of its electrically conductive properties is observed. This may be due to changes in the structure of the coating under the influence of certain technological and operational factors, namely: process temperature, holding time, gas environment during the application and operation of a transparent electrically conductive coating. Studies have confirmed a significant increase in electrical conductivity. They also found a slight decrease in the transmittance of transparent oxide-tin films obtained with the introduction of ammonium fluoride as a dopant during the pyrolysis of 1M alcohol solutions of Sn2+ and Sn4+chlorides and are widely used as precursors for the content of such coatings. So, with a ratio of Sn4+/F=10 in working solutions, a minimum of specific surface resistance was fixed at 32 Ohm/m2. At the same time, a decrease in the value of the averaged transmittance in the optical wavelength range of 0.2-6.0 μm by 51 %, and in its visible part (0.4-0.8 μm) by 11 %. It is shown that thermal degradation of the coating is a significant factor in increasing the resistance values both in the technological process and during operational impacts. The results obtained indicate that reheating to temperatures above 450 °C leads to the appearance of the phenomenon of thermal degradation of the electrically conductive properties of the coating. So, during a 1-hour exposure at a temperature of 550 °C, the increase in specific surface resistance increases by 2 times and is fixed at 68 Ohm/m2 after complete cooling. Repeated heating cycles with the indicated parameters lead to a significantly lesser effect, which may indicate stabilization of the processes that occur during thermal destruction of the electrically conductive coating.