Abstract
AbstractThe selectivity of the sputtering process of CuNi and AgPd alloys with different bulk compositions during Ar+‐, N+2‐ and He+‐ion bombardment was studied by the help of Auger electron spectroscopy. It was found that for CuNi alloys a Ni‐enrichment and for AgPd alloys a Pd enrichment takes place compared with bulk composition. The selectivity of the sputtering process decreases with decreasing sputtering ion mass. This result was explained in the case of CuNi alloys on the base of the dependence of elemental sputtering coefficients on the sputtering ion mass.
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