Abstract
The structural properties of Si crystals that were made ferromagnetic through Mn-ion implantation are studied. 300-keV Mn+ ions were implanted at 350°C at doses of 1–10×1015cm−2 reaching peak concentrations of 0.1–0.8at.%. Ferromagnetic hysteresis loops were obtained using a SQUID magnetometer at temperature of 300K, yielding a saturation magnetization of 0.2emu/g after annealing at 800°C for 5min. The Curie temperature for all samples was found to be greater than 400K. After annealing, a pronounced redistribution of Mn is observed in the depth profiles as measured through SIMS profiling. The quality of the resulting crystal structure has been investigated by RBS in the channeling mode.
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