Abstract
The analysis of composition of low-pressure (~0.1-1 mTorr) hollow cathode arc plasma in Ar+N2 gas mixture with Ti+hexamethyldisilazane vapors was carried out by optical emission spectroscopy. The influence of HMDS flow rate (1-10 g/h), discharge current (10-50 A) and Ti-vapors flow on hexamethyldisilazane decomposition degree and plasma composition and was investigated. The proposed plasma activation method provides both an intense flow and a high activation degree of metal vapors, and a sufficient decomposition degree of precursor vapors for the formation of solid TiSiCN coatings at a high deposition rate. Test coatings with a thickness of 6 microns and a hardness of 31 GPa were obtained in 1 hour at 400ºC.
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