Abstract
Abstract Silicon containing powders (Si3N4) and SiC) have been produced by TEA CO2 laser induced reactions in the gas phase. NH3 and several hydrocarbons (C2H4, C3H6, C2H2) have been used as additives to SiH4. The gas-phase decomposition process has been studied by detecting the entire luminescence spectrum emitted by early reaction products with an optical multichannel analyzer. Powder composition and morphology have been studied through IR spectrophotometry, X-ray diffraction at wide (WAXS) and small (SAXS) angles. The powder stoichiometry has been checked by using standard LECO systems for C and N determination.
Published Version
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