Abstract
we are studying the inhomogeneity of the thickness properties of the deposited ZnO:B film Based on glass substrates obtained by low pressure chemical viper deposition (LPCVD), which allow us to develop recommendations for optimizing the technological process for obtaining ZnO layers with characteristics that best meet the requirements for use in solar modules.The haze factor of the deposited ZnO film on a glass substrate with a size of 1300x1100 mm is 26.6% (average for glass) and 34% (maximum value), the average value of the value of the surface resistance is 17.6 O which is matching with a film thickness of 1657 nm, which leads to an improvement in the efficiency of the solar cell from (9.04%-10.1%).
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