Abstract
The paper presents the results of an experimental study of the emission spectra of a gas discharge during high-power impulse magnetron sputtering. The influence of the repetition frequency and duration of current pulses on the intensity of the spectral lines of various particles is shown. The parameters of the gas-discharge plasma during HiPIMS and at a direct current were also compared.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
