Investigation of the influence of double-sided diaphragm on performance of capacitance and sensitivity of touch mode capacitive pressure sensor: numerical modeling and simulation forecasting

Abstract

Microelectromechanical system-based capacitive pressure sensors have seen significant advancements in modeling and design. This paper provides a complete analysis of a novel improvement to existing models of the touch mode capacitive pressure sensor. An in-depth, step-by-step derivation of the capacitance, capacitive sensitivity and mechanical sensitivity is examined for the double-sided touch mode capacitive pressure sensor. The results generated are modeled and examined using MATLAB. Comparisons with previous models clearly delineate the improved performance in terms of capacitance and sensitivity. The analysis conducted dovetail perfectly with the modeled results.